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Microchip
Fabrication
By Peter Van Zant
Semiconductor Services 1996 - 400 pages easily
If you are a EE engineer or someone that works for a
semiconductor company in a technical capacity than this book
probably isn't for you.
The reason I purchased this book is because it lays out the
basics of integrated circuit manufacturing methods and
techniques, and does it at a level that a non-EE fellow like
me can appreciate. This is an excellent book for someone who
knows little about semiconductors. It goes into historical and
current wafer processing trends and discusses a few of the
challenges for future technology nodes. The book touches on
most parts of fabrication and presents simplified versions of
the theory and equipment involved. Not for advanced readers.
People I know, who are EE majors and some of whom work in
the semiconductor industry pointed out to me that there are
numerous misapplied homonyms (a "quartz vile"
instead of a "quartz vial", for example), and some
"facts" that are just plain wrong (copper coils for
the heating elements in a resistance-heated furnace). They
said "Shame on the author and the publisher for not
performing a thorough proofreading of this otherwise useful
text." One person pointed me to a page where ozone was
mistakenly printed as O2 rather than O3.
All and all, this isn't magazine reading in terms of ease
but I learned a lot about the technical process in the
manufacturing of semiconductors. Heck, before I read this book
I had no clue how many steps were involved in the production
of semiconductors. If you read this book you can get a much
better appreciation of that aspect.
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